RF MEMs variable capacitors for tunable filtersInternational Journal of RF and Microwave Computer-Aided Engineering
Volume 9, Issue 4, July 1999, Pages: 362–374, Charles L. Goldsmith, Andrew Malczewski, Zhimin J. Yao, Shea Chen, John Ehmke and David H. Hinzel
Article first published online : 28 MAY 1999, DOI: 10.1002/(SICI)1099-047X(199907)9:4<362::AID-MMCE7>3.0.CO;2-H