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There are 23733 results for: content related to: Effect of substrate bias on the properties of microcrystalline silicon films deposited by hot-wire chemical vapor deposition

  1. On the Effect of the Amorphous Silicon Microstructure on the Grain Size of Solid Phase Crystallized Polycrystalline Silicon

    Advanced Energy Materials

    Volume 1, Issue 3, May, 2011, Pages: 401–406, Kashish Sharma, Annalisa Branca, Andrea Illiberi, Frans D. Tichelaar, Mariadriana Creatore and Mauritius C. M. van de Sanden

    Version of Record online : 11 MAR 2011, DOI: 10.1002/aenm.201000074

  2. Biomedical applications of diamond-like carbon coatings: A review

    Journal of Biomedical Materials Research Part B: Applied Biomaterials

    Volume 83B, Issue 1, October 2007, Pages: 72–84, Ritwik Kumar Roy and Kwang-Ryeol Lee

    Version of Record online : 6 FEB 2007, DOI: 10.1002/jbm.b.30768

  3. Influence of electrodes' distance upon properties of intrinsic and doped amorphous silicon films for heterojunction solar cells

    physica status solidi (a)

    Volume 211, Issue 5, May 2014, Pages: 1106–1112, Nils Brinkmann, Angelika Gorgulla, Anja Bauer, Daniel Skorka, Gabriel Micard, Giso Hahn and Barbara Terheiden

    Version of Record online : 3 MAR 2014, DOI: 10.1002/pssa.201330343

  4. Effect of ion energy on structural and electrical properties of intrinsic microcrystalline silicon layer deposited in a matrix distributed electron cyclotron resonance plasma reactor

    physica status solidi (a)

    Volume 207, Issue 3, March 2010, Pages: 591–594, Sanjay K. Ram, Laurent Kroely, Pavel Bulkin and Pere Roca i Cabarrocas

    Version of Record online : 18 JAN 2010, DOI: 10.1002/pssa.200982905

  5. Effects of bias voltage on structure and properties of TiAl-doped a-C:H films prepared by magnetron sputtering

    Surface and Interface Analysis

    Volume 43, Issue 3, March 2011, Pages: 677–682, Xianjuan Pang, Junying Hao, Peng Wang, Yanqiu Xia and Weimin Liu

    Version of Record online : 22 JUN 2010, DOI: 10.1002/sia.3501

  6. A study of structural and wear properties of PACVD deposited a-C:H thin films for application as protective layers on Al alloys

    physica status solidi (a)

    Volume 212, Issue 10, October 2015, Pages: 2271–2277, Daniel Kottfer, Marian Marton, Milan Ferdinandy, Peter Trebuňa and Lukasz Kaczmarek

    Version of Record online : 6 JUL 2015, DOI: 10.1002/pssa.201431866

  7. You have free access to this content
    Development of a-SiOx:H solar cells with very high Voc × FF product

    Progress in Photovoltaics: Research and Applications

    Volume 23, Issue 6, June 2015, Pages: 671–684, Do Yun Kim, Erwin Guijt, René A. C. M. M. van Swaaij and Miro Zeman

    Version of Record online : 3 DEC 2014, DOI: 10.1002/pip.2581

  8. The tribological performance of fullerene-like hydrogenated carbon films under ionic liquid lubrication

    Surface and Interface Analysis

    Volume 47, Issue 9, September 2015, Pages: 903–910, Kunyao Wu, Li Qiang, Zhenbin Gong, Gengrui Zhao, Kaixiong Gao, Bin Zhang and Junyan Zhang

    Version of Record online : 11 AUG 2015, DOI: 10.1002/sia.5793

  9. Toughening Thin-Film Structures with Ceramic-Like Amorphous Silicon Carbide Films


    Volume 10, Issue 2, January 29, 2014, Pages: 253–257, Yusuke Matsuda, Ill Ryu, Sean W. King, Jeff Bielefeld and Reinhold H. Dauskardt

    Version of Record online : 25 JUL 2013, DOI: 10.1002/smll.201300130

  10. Electrical and optical properties of boron-doped nanocrystalline silicon films deposited by PECVD

    physica status solidi (a)

    Volume 207, Issue 1, January 2010, Pages: 144–148, Zhe Li, Xiwen Zhang and Gaorong Han

    Version of Record online : 17 SEP 2009, DOI: 10.1002/pssa.200925107

  11. Elastic Modulus and Hardness of Plasma-Polymerized Organosilicones Evaluated by Nanoindentation Techniques

    Plasma Processes and Polymers

    Volume 12, Issue 9, September 2015, Pages: 864–881, Vladimir Cech, Jaroslav Lukes, Erik Palesch and Tomas Lasota

    Version of Record online : 22 JUN 2015, DOI: 10.1002/ppap.201500036

  12. The structure and tribological properties of aluminum/carbon nanocomposite thin films synthesized by reactive magnetron sputtering

    Surface and Interface Analysis

    Volume 43, Issue 7, July 2011, Pages: 1057–1063, Shengguo Zhou, Liping Wang and Qunji Xue

    Version of Record online : 3 SEP 2010, DOI: 10.1002/sia.3691

  13. Hydrogenated amorphous silicon based surface passivation of c-Si at high deposition temperature and rate

    physica status solidi (RRL) - Rapid Research Letters

    Volume 4, Issue 8-9, September 2010, Pages: 206–208, A. Illiberi, M. Creatore, W. M. M. Kessels and M. C. M. van de Sanden

    Version of Record online : 23 JUN 2010, DOI: 10.1002/pssr.201004234

  14. Silicon Oxycarbide Films Produced by Remote Microwave Hydrogen Plasma CVD using a Tetramethyldisiloxane Precursor: Growth Kinetics, Structure, Surface Morphology, and Properties 

    Chemical Vapor Deposition

    Volume 21, Issue 10-11-12, December 2015, Pages: 307–318, Aleksander M. Wrobel, Pawel Uznanski and Agnieszka Walkiewicz-Pietrzykowska

    Version of Record online : 17 NOV 2015, DOI: 10.1002/cvde.201507185

  15. Polycrystalline Silicon/Dielectric/Substrate Material Systems for Thin Film Transistor Applications: The Impact of Material Properties on Transistors' Characteristics

    physica status solidi (a)

    Volume 176, Issue 2, December 1999, Pages: 885–909, Y. Z. Wang and O. O. Awadelkarim

    Version of Record online : 16 DEC 1999, DOI: 10.1002/(SICI)1521-396X(199912)176:2<885::AID-PSSA885>3.0.CO;2-L

  16. Modification of clarified polypropylene by oxygen plasma to improve the adhesion of thin amorphous hydrogenated carbon films deposited by plasma enhanced chemical vapor deposition

    Polymer Engineering & Science

    Volume 53, Issue 5, May 2013, Pages: 1065–1072, P.H.L. Aguiar, É.C. Oliveira and S.A. Cruz

    Version of Record online : 18 OCT 2012, DOI: 10.1002/pen.23351

  17. Influence of bias voltage on the structure and deposition mechanism of diamond-like carbon films produced by RF (13.56 MHz) CH4 plasma

    physica status solidi (a)

    Volume 207, Issue 10, October 2010, Pages: 2311–2318, M. Ouchabane, H. Salah, M. Herrmann, N. Tabet, K. Henda, B. Touchrift and M. Kechouane

    Version of Record online : 29 JUN 2010, DOI: 10.1002/pssa.200925581

  18. Microstructural tuning of polycrystalline silicon films from hydrogen diluted amorphous silicon films by AIC

    physica status solidi (c)

    Volume 8, Issue 3, March 2011, Pages: 859–862, P. Prathap, O. Tuzun, S. Roques, S. Schmitt, C. Maurice and A. Slaoui

    Version of Record online : 20 JAN 2011, DOI: 10.1002/pssc.201000369

  19. Amorphous and crystalline In2O3-based transparent conducting films for photovoltaics

    physica status solidi (a)

    Takashi Koida

    Version of Record online : 20 SEP 2016, DOI: 10.1002/pssa.201600464

  20. Substrate-thickness Dependence of Hydrogenated Microcrystalline Silicon Nucleation Rate on Amorphous Silicon Layer

    Chemical Vapor Deposition

    Volume 19, Issue 10-11-12, December 2013, Pages: 363–366, Zewen Zuo, Guanglei Cui, Yu Wang, Junzhuan Wang, Lin Pu and Yi Shi

    Version of Record online : 12 NOV 2013, DOI: 10.1002/cvde.201307003