Smart Material Systems and MEMS: Design and Development Methodologies

Smart Material Systems and MEMS: Design and Development Methodologies

Author(s): Vijay K. Varadan, K. J. Vinoy, S. Gopalakrishnan

Published Online: 19 OCT 2006

Print ISBN: 9780470093610

Online ISBN: 9780470093634

DOI: 10.1002/0470093633

About this Book

Presenting unified coverage of the design and modeling of smart micro- and macrosystems, this book addresses fabrication issues and outlines the challenges faced by engineers working with smart sensors in a variety of applications.

Part I deals with the fundamental concepts of a typical smart system and its constituent components. Preliminary fabrication and characterization concepts are introduced before design principles are discussed in detail. Part III presents a comprehensive account of the modeling of smart systems, smart sensors and actuators. Part IV builds upon the fundamental concepts to analyze fabrication techniques for silicon-based MEMS in more detail.

Practicing engineers will benefit from the detailed assessment of applications in communications technology, aerospace, biomedical and mechanical engineering. The book provides an essential reference or textbook for graduates following a course in smart sensors, actuators and systems.

Table of contents

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  1. Part I: Fundamentals

  2. Part 2: Design Principles

  3. Part 3: Modeling Techniques

  4. Part 4: Fabrication Methods and Applications

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