Handbook of Chemicals and Gases for the Semiconductor Industry

Handbook of Chemicals and Gases for the Semiconductor Industry

Online ISBN: 9780471263852

DOI: 10.1002/0471263850

About this Book

Welcome to the first comprehensive guide to the chemicals and gases used in semiconductor manufacturing. The fabrication of semiconductor devices involves a series of complex chemical processes such as photolithography, etching, cleaning, thin film deposition, and polishing. The Handbook of Chemicals and Gases for the Semiconductor Industry is your convenient source of information on the properties, applications, and health and safety considerations of the chemicals used in these processes.

Each of the online Handbook's eight sections is related to a specific area of semiconductor processing. The authors provide a brief overview of each step in the process, followed by tables containing physical properties, handling, safety, and other pertinent information on chemicals and gases typically used in these processes. The 270 chemical and gas entries include data on physical properties, emergency treatment procedures, waste disposal, and incompatible materials, as well as descriptions of applications, chemical mechanisms involved, and references to the literature. Appendices cross-reference entries by process, chemical name, and CAS number. The Handbook's sections are:

  • Thin Film Deposition Materials
  • Water Cleaning Chemicals
  • Photolithography Materials
  • Wet and Dry Etching Materials
  • Chemical Mechanical Planarizing Materials
  • Carrier Gases
  • Uncategorized Materials
  • Semiconductor Chemicals Analysis

The Handbook of Chemicals and Gases for the Semiconductor Industry is a valuable reference for process engineers, scientists, suppliers to the semiconductor industry, microelectronics researchers, and students.

With the flexibility afforded by the powerful search and navigation capabilities of Wiley Online Library , you will be able to search the encyclopedia by subject, article and keyword. In addition, you can simultaneously search the Handbook of Chemicals and Gases for the Semiconductor Industry as well as Wiley's extensive collection of journals and a variety of other reference sources—including the Kirk-Othmer Encyclopedia of Chemical Technology, Ullmann's Encyclopedia of Industrial Chemistry, Encyclopedia of Polymer Science and Technology and the forthcoming Wiley Database of Polymer Properties , as well as many others.

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