Semiconductors for Micro- and Nanotechnology: An Introduction for Engineers
Copyright © 2002 Wiley-VCH Verlag GmbH
Author(s): Prof., Dr. Jan G. Korvink, Dr. Andreas Greiner
Published Online: 29 OCT 2002
Print ISBN: 9783527302574
Online ISBN: 9783527600229
About this Book
Semiconductors play a major role in modern microtechnology, especially in microelectronics. Since the dimensions of new microelectronic components, e.g. computer chips, now reach nanometer size, semiconductor research moves from microtechnology to nanotechnology.
An understanding of the semiconductor physics involved in this new technology is of great importance for every student in engineering, especially electrical engineering, microsystem technology and physics.
This textbook emphasizes a system-oriented view of semiconductor physics for applications in microsystem technology. While existing books only cover electronic device physics and are mainly written for physics students, this text gives a more hands-on approach to semiconductor physics and so avoids overloading engineering students with mathematical formulas not essential for their studies.