Metal Based Thin Films for Electronics

Metal Based Thin Films for Electronics

Editor(s): Klaus Wetzig, Claus M. Schneider

Published Online: 28 JAN 2005

Print ISBN: 9783527403653

Online ISBN: 9783527602537

DOI: 10.1002/3527602534

About this Book

This up-to-date handbook covers the main topics of preparation, characterization and properties of complex metal-based layer systems. The authors -- an outstanding group of researchers -- discuss advanced methods for structure, chemical and electronic state characterization with reference to the properties of thin functional layers, such as metallization and barrier layers for microelectronics, magnetoresistive layers for GMR and TMR, sensor and resistance layers. As such, the book addresses materials specialists in industry, especially in microelectronics, as well as scientists, and can also be recommended for advanced studies in materials science, analytics, surface and solid state science.

Table of contents

    1. You have free access to this content
    2. Chapter 1

      Introduction (pages 1–5)

      PD Dr. rer. nat. habil. Klaus Wetzig and PD Dr. rer. nat. habil. Claus M. Schneider

    3. Chapter 2

      Thin Film Systems: Basic Aspects (pages 7–120)

      Dr. rer. nat. Ralph Spolenak, Dr. rer. nat. habil. Ehrenfried Zschech, Dr. rer. nat. habil. Manfred Weihnacht, Dr. rer. nat. Joachim Schumann, PD. Dr. rer. nat. habil. Claus M. Schneider, Dr. rer. nat. habil. Hermann Mai and Dipl.-Phys. Stefan Braun

    4. Chapter 3

      Thin Film Preparation and Characterization Technique (pages 121–203)

      Dr. rer. nat. Christian Wenzel, Prof. Dr. rer. nat. habil. Klaus Wetzig, Dr. rer. nat. Jürgen Thomas, Dr. rer. nat. Michael Hecker and Dr. rer. nat. habil. Winfried Brückner

    5. Chapter 4

      Challenges for Thin Film Systems Characterization and Optimization (pages 205–316)

      Dr. rer. nat. Ralph Spolenak, Dr. rer. nat. Horst Wendrock, Prof. Dr. rer. nat. habil. Klaus Wetzig, Dr. rer. nat. habil. Ehrenfried Zschech, Dr.-Ing. Siegfried Menzel, PD. Dr. rer. nat. habil. Claus M. Schneider, Dr. rer. nat. Hartmut Vinzelberg, Dr. rer. nat. Dieter Elefant, Dr. rer. nat. habil. Hermann Mai, Dipl.-Phys. Stefan Braun, Dr. rer. nat. Joachim Schumann and Dr. rer. nat. Jürgen Thomas

    6. Chapter 5

      Devices (pages 317–364)

      Dr. rer. nat. habil. Ehrenfried Zschech, Dr. rer. nat. habil. Manfred Weihnacht, Dr. rer. nat. Christoph Treutler, Dr. rer. nat. habil. Hermann Mai, Dipl.-Phys. Stefan Braun and Dr. rer. nat. Joachim Schumann

    7. Chapter 6

      Outlook (pages 365–369)

      Prof. Dr. rer. nat. habil. Klaus Wetzig and PD Dr. rer. nat. habil. Claus M. Schneider

    8. You have free access to this content

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