Metal Based Thin Films for Electronics
Copyright © 2003 Wiley-VCH Verlag GmbH & Co. KGaA
Editor(s): Klaus Wetzig, Claus M. Schneider
Published Online: 28 JAN 2005
Print ISBN: 9783527403653
Online ISBN: 9783527602537
About this Book
This up-to-date handbook covers the main topics of preparation, characterization and properties of complex metal-based layer systems. The authors -- an outstanding group of researchers -- discuss advanced methods for structure, chemical and electronic state characterization with reference to the properties of thin functional layers, such as metallization and barrier layers for microelectronics, magnetoresistive layers for GMR and TMR, sensor and resistance layers. As such, the book addresses materials specialists in industry, especially in microelectronics, as well as scientists, and can also be recommended for advanced studies in materials science, analytics, surface and solid state science.