Nanoscale Calibration Standards and Methods: Dimensional and Related Measurements in the Micro- and Nanometer Range

Nanoscale Calibration Standards and Methods: Dimensional and Related Measurements in the Micro- and Nanometer Range

Editor(s): Günter Wilkening, Ludger Koenders

Published Online: 31 MAR 2006

Print ISBN: 9783527405022

Online ISBN: 9783527606665

DOI: 10.1002/3527606661

About this Book

The quantitative determination of the properties of micro- and nanostructures is essential in research and development. It is also a prerequisite in process control and quality assurance in industry. The knowledge of the geometrical dimensions of structures in most cases is the base, to which other physical and chemical properties are linked. Quantitative measurements require reliable and stable instruments, suitable measurement procedures as well as appropriate calibration artefacts and methods. The seminar "NanoScale 2004" (6th Seminar on Quantitative Microscopy and 2nd Seminar on Nanoscale Calibration Standards and Methods) at the National Metrology Institute (Physikalisch-Technische Bundesanstalt PTB), Braunschweig, Germany, continues the series of seminars on Quantitative Microscopy. The series stimulates the exchange of information between manufacturers of relevant hard- and software and the users in science and industry.

Topics addressed in these proceedings are
a) the application of quantitative measurements and measurement problems in: microelectronics, microsystems technology, nano/quantum/molecular electronics, chemistry, biology, medicine, environmental technology, materials science, surface processing
b) calibration & correction methods: calibration methods, calibration standards, calibration procedures, traceable measurements, standardization, uncertainty of measurements
c) instrumentation and methods: novel/improved instruments and methods, reproducible probe/sample positioning, position-measuring systems, novel/improved probe/detector systems, linearization methods, image processing

Table of contents

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  1. Part I: Instrumentation – Overview

    1. Chapter 2

      Nanometrology at the IMGC (pages 22–37)

      M. Bisi, E. Massa, A. Pasquini, G. B. Picotto and M. Pisani

  2. Part II: Instrumentation – Long-range Scanning Probe Microscopes

  3. Part III: Instrumentation – Development of SPM and Sensors

    1. Chapter 10

      Combined Confocal and Scanning Probe Sensor for Nano-Coordinate Metrology (pages 131–143)

      Dmitri V. Sokolov, Dmitri V. Kazantsev, James W. G. Tyrrell, Tomasz Hasek and Hans U. Danzebrink

  4. Part IV: Calibration – Overview

  5. Part V: Calibration – Standards for Nanometrology

  6. Part VI: Calibration – Tip shape

  7. Part VII: Calibration – Optical Methods

  8. Part VIII: Application – Lateral Structures

  9. Part IX: Application – Surfaces

    1. Chapter 32

      Investigation of the Surface Roughness Measurement of Mass Standards (pages 424–433)

      C. Zerrouki, L. R. Pendrill, J. M. Bennett, Y. Haidar, F. de Fornel and P. Pinot

  10. Part X: Application – Material Properties

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