Scaling Issues and Design of MEMS

Scaling Issues and Design of MEMS

Author(s): Salvatore Baglio, Salvatore Castorina, Nicolò Savalli

Print ISBN: 9780470016992

Online ISBN: 9780470034071

DOI: 10.1002/9780470034071

Author Biography

About the Author

Salvatore Baglio, Associate Professor of Electronic Instrumentations and Measurements, University of Catania, Italy.  Salvatore Baglio has co-authored over 150 scientific publications and his research interests include nonlinear and chaotic dynamical systems, smart sensors, microsensors and Microsystems.

Salvatore Castorina, Electrical and Electronic Measurements Group, University of Catania.  Salvatore Castorina is co-author of over 20 scientific papers and his research interests include micro and nano electromechanical systems, magnetic and thermal, micro sensors and micro actuators, micro and nano robotics.

Luigi Fortuna, Professor of System Theory, University of Catania.  Luigi Fortuna has published more than 280 technical papers and his interests include nonlinear science and complexity, chaos and cellular neural networks.

NicolòSavalli, Engineering Faculty, University of Catania.  Nicolò Savalli teaches courses in Measurement Theory and Measurement Applications and is co-author of more than 35 scientific publications. His research interests include micro-electro-mechanical-systems (MEMS) and micro-opto-electro-mechanical-systems (MOEMS).