Silicon Technologies: Ion Implantation and Thermal Treatment

Silicon Technologies: Ion Implantation and Thermal Treatment

Editor(s): Annie Baudrant

Published Online: 19 MAR 2013

Print ISBN: 9781848212312

Online ISBN: 9781118601044

DOI: 10.1002/9781118601044

About this Book

The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules in major Front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion.

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