Microsystem Technology

Microsystem Technology

Author(s): Prof. Dr. W. Menz, Dr. J. Mohr, Prof. Dr. O. Paul

Published Online: 14 DEC 2007

Print ISBN: 9783527296347

Online ISBN: 9783527613007

DOI: 10.1002/9783527613007

About this Book

This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.

Table of contents