Microsystem Technology

Microsystem Technology

Author(s): Prof. Dr. W. Menz, Dr. J. Mohr, Prof. Dr. O. Paul

Print ISBN: 9783527296347

Online ISBN: 9783527613007

DOI: 10.1002/9783527613007


"...written by excellent experts in the field and gives a very deep and wide introduction to this important technology. The Text includes may practical examples already realized, and many details for the fabrication processes are explained. I can recommend this book without any restrictions tp engineers as well as physicists, and other scientists in this field." Optik