CVD of Compound Semiconductors: Precursor Synthesis, Development and Applications
Copyright © 1997 VCH Verlagsgesellschaft mbH
Author(s): Prof. Anthony C. Jones, Prof. Paul O'Brien
Published Online: 7 OCT 2008
Print ISBN: 9783527292943
Online ISBN: 9783527614639
About this Book
Chemical growth methods of electronic materials are the keystone of microelectronic device processing. This book discusses the applications of metalorganic chemistry for the vapor phase deposition of compound semiconductors. Vapor phase methods used for semiconductor deposition and the materials properties that make the organometallic precursors useful in the electronics industry are discussed for a variety of materials.
* techniques for compound semiconductor growth
* metalorganic precursors for III-V MOVPE
* metalorganic precursors for II-VI MOVPE
* single-source precursors
* chemical beam epitaxy
* atomic layer epitaxy
Several useful appendixes and a critically selected, up-to-date list of references round off this practical handbook for materials scientists, solid-state and organometallic chemists, and engineers.