Enabling Technology for MEMS and Nanodevices
Copyright © 2004 WILEY-VCH Verlag GmbH & Co. KGaA
Editor(s): H. Baltes, O. Brand, G. K. Fedder, C. Hierold, J. G. Korvink, O. Tabata
Published Online: 29 FEB 2008
Print ISBN: 9783527307463
Online ISBN: 9783527616701
Book Series: Advanced Micro and Nanosystems
About this Book
Microstructures, electronics, nanotechnology - these vast fields of research are growing together as the size gap narrows and many different materials are combined. Current research, engineering sucesses and newly commercialized products hint at the immense innovative potentials and future applications that open up once mankind controls shape and function from the atomic level right up to the visible world without any gaps.
Sensor systems, microreactors, nanostructures, nanomachines, functional surfaces, integrated optics, displays, communications technology, biochips, human/machine interfaces, prosthetics, miniaturized medical and surgery equipment and many more opportunities are being explored.
This new series, Advanced Micro & Nanosystems, provides cutting-edge reviews from top authors on technologies, devices and advanced systems from the micro and nano worlds.