Enabling Technology for MEMS and Nanodevices

Enabling Technology for MEMS and Nanodevices

Editor(s): H. Baltes, O. Brand, G. K. Fedder, C. Hierold, J. G. Korvink, O. Tabata

Published Online: 29 FEB 2008

Print ISBN: 9783527307463

Online ISBN: 9783527616701

DOI: 10.1002/9783527616701

About this Book

This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. A close look at enabling technologies is taken, the first section on MEMS featuring an introduction to the challenges and benefi ts of three-dimensional silicon
processing. An insider's view of industrial MEMS commercialization is followed by chapters on capacitive interfaces for MEMS, packaging issues of micro- and nanosystems, MEMS contributions to high frequency integrated resonators and filters, and the uses of MEMS in mass
data storage and electrochemical imaging by means of scanning micro- and nanoprobes.

The second section on nanodevices first tackles the emerging topic of nanofluidics with a contribution each on simulation tools and on devices and uses, followed by another two on nanosensors featuring CNT sensors and CMOS-based DNA sensor arrays, respectively.

Table of contents

    1. You have free access to this content
    2. Chapter 4

      Packaging of Advanced Micro- and Nanosystems (pages 93–164)

      V. M. Bright, C. R. Stoldt, D. J. Monk, M. Chapman and A. Salian

    3. Chapter 6

      MEMS in Mass Storage Systems (pages 193–236)

      T. R. Albrecht, M. Despont, E. Eleftheriou, J. U. Bu and T. Hirano

    4. Chapter 11

      CMOS-based DNA Sensor Arrays (pages 383–414)

      R. Thewes, F. Hofmann, A. Frey, M. Schienle, C. Paulus, P. Schindler-Bauer, B. Holzapfl and R. Brederlow

    5. You have free access to this content