Enabling Technology for MEMS and Nanodevices

Enabling Technology for MEMS and Nanodevices

Editor(s): H. Baltes, O. Brand, G. K. Fedder, C. Hierold, J. G. Korvink, O. Tabata

Published Online: 29 FEB 2008

Print ISBN: 9783527307463

Online ISBN: 9783527616701

DOI: 10.1002/9783527616701

About this Book

Microstructures, electronics, nanotechnology - these vast fields of research are growing together as the size gap narrows and many different materials are combined. Current research, engineering sucesses and newly commercialized products hint at the immense innovative potentials and future applications that open up once mankind controls shape and function from the atomic level right up to the visible world without any gaps.

Sensor systems, microreactors, nanostructures, nanomachines, functional surfaces, integrated optics, displays, communications technology, biochips, human/machine interfaces, prosthetics, miniaturized medical and surgery equipment and many more opportunities are being explored.

This new series, Advanced Micro & Nanosystems, provides cutting-edge reviews from top authors on technologies, devices and advanced systems from the micro and nano worlds.

Table of contents

    1. You have free access to this content
    2. Chapter 4

      Packaging of Advanced Micro- and Nanosystems (pages 93–164)

      V. M. Bright, C. R. Stoldt, D. J. Monk, M. Chapman and A. Salian

    3. Chapter 6

      MEMS in Mass Storage Systems (pages 193–236)

      T. R. Albrecht, M. Despont, E. Eleftheriou, J. U. Bu and T. Hirano

    4. Chapter 11

      CMOS-based DNA Sensor Arrays (pages 383–414)

      R. Thewes, F. Hofmann, A. Frey, M. Schienle, C. Paulus, P. Schindler-Bauer, B. Holzapfl and R. Brederlow

    5. You have free access to this content