CMOS - MEMS

CMOS - MEMS

Editor(s): O. Brand, G. K. Fedder

Published Online: 29 FEB 2008

Print ISBN: 9783527310807

Online ISBN: 9783527616718

DOI: 10.1002/9783527616718

About this Book

Microstructures, electronics, nanotechnology - these vast fields of research are growing together as the size gap narrows and many different materials are combined. Current research, engineering sucesses and newly commercialized products hint at the immense innovative potentials and future applications that open up once mankind controls shape and function from the atomic level right up to the visible world without any gaps.

Sensor systems, microreactors, nanostructures, nanomachines, functional surfaces, integrated optics, displays, communications technology, biochips, human/machine interfaces, prosthetics, miniaturized medical and surgery equipment and many more opportunities are being explored.

This new series, Advanced Micro and Nano Systems, provides cutting-edge reviews from top authors on technologies, devices and advanced systems from the micro and nano worlds.

Table of contents

    1. You have free access to this content
    2. Chapter 3

      Monolithically Integrated Inertial Sensors (pages 137–191)

      G. K. Fedder, J. Chae, K. Najafi, T. Denison, J. Kuang, S. Lewis and H. Kulah

    3. You have free access to this content

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