Micro Process Engineering: Fundamentals, Devices, Fabrication, and Applications

Micro Process Engineering: Fundamentals, Devices, Fabrication, and Applications

Editor(s): Norbert Kockmann

Published Online: 29 FEB 2008

Print ISBN: 9783527312467

Online ISBN: 9783527616749

DOI: 10.1002/9783527616749

About this Book

This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. A close look at enabling technologies is taken, the first section on MEMS featuring an introduction to the challenges and benefi ts of three-dimensional silicon
processing. An insider's view of industrial MEMS commercialization is followed by chapters on capacitive interfaces for MEMS, packaging issues of micro- and nanosystems, MEMS contributions to high frequency integrated resonators and filters, and the uses of MEMS in mass
data storage and electrochemical imaging by means of scanning micro- and nanoprobes.

The second section on nanodevices first tackles the emerging topic of nanofluidics with a contribution each on simulation tools and on devices and uses, followed by another two on nanosensors featuring CNT sensors and CMOS-based DNA sensor arrays, respectively.

Table of contents

    1. You have free access to this content
    2. Chapter 7

      Design Process and Project Management (pages 203–233)

      Steffen Schirrmeister, Jürgen J. Brandner and Norbert Kockmann

    3. Chapter 10

      Microfabrication in Metals and Polymers (pages 267–319)

      Jürgen J. Brandner, Thomas Gietzelt, Torsten Henning, Manfred Kraut, Holger Moritz and Wilhelm Pfleging

    4. You have free access to this content

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