Micro Process Engineering: Fundamentals, Devices, Fabrication, and Applications

Micro Process Engineering: Fundamentals, Devices, Fabrication, and Applications

Editor(s): Norbert Kockmann

Published Online: 29 FEB 2008

Print ISBN: 9783527312467

Online ISBN: 9783527616749

DOI: 10.1002/9783527616749

About this Book

This edition of 'Micro Process Engineering' was originally published in the successful series 'Advanced Micro & Nanosystems'.
Authors from leading industrial players and research institutions present a concise and didactical introduction to Micro Process Engineering, the combination of microtechnology and process engineering into a most promising and powerful tool for revolutionizing chemical processes and industrial mass production of bulk materials, fine chemicals, pharmaceuticals and many other products.

The book takes the readers from the fundamentals of engineering methods, transport processes, and fluid dynamics to device conception, simulation and modelling, control interfaces and issues of modularity and compatibility. Fabrication strategies and techniques are examined next, focused on the fabrication of suitable microcomponents from various materials such as metals, polymers, silicon, ceramics and glass.
The book concludes with actual applications and operational aspects of micro process systems, giving broad coverage to industrial efforts in America, Europe and Asia as well as laboratory equipment and education.

Table of contents

    1. You have free access to this content
    2. Chapter 7

      Design Process and Project Management (pages 203–233)

      Steffen Schirrmeister, Jürgen J. Brandner and Norbert Kockmann

    3. Chapter 10

      Microfabrication in Metals and Polymers (pages 267–319)

      Jürgen J. Brandner, Thomas Gietzelt, Torsten Henning, Manfred Kraut, Holger Moritz and Wilhelm Pfleging

    4. You have free access to this content