Micro Process Engineering: Fundamentals, Devices, Fabrication, and Applications
Copyright © 2006 WILEY-VCH Verlag GmbH & Co. KGaA
Editor(s): Norbert Kockmann
Published Online: 29 FEB 2008
Print ISBN: 9783527312467
Online ISBN: 9783527616749
Book Series: Advanced Micro and Nanosystems
About this Book
This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. A close look at enabling technologies is taken, the first section on MEMS featuring an introduction to the challenges and benefi ts of three-dimensional silicon
processing. An insider's view of industrial MEMS commercialization is followed by chapters on capacitive interfaces for MEMS, packaging issues of micro- and nanosystems, MEMS contributions to high frequency integrated resonators and filters, and the uses of MEMS in mass
data storage and electrochemical imaging by means of scanning micro- and nanoprobes.
The second section on nanodevices first tackles the emerging topic of nanofluidics with a contribution each on simulation tools and on devices and uses, followed by another two on nanosensors featuring CNT sensors and CMOS-based DNA sensor arrays, respectively.