Handbook of Semiconductor Technology: Processing of Semiconductors, Volume 2

Copyright © 2000 WILEY-VCH Verlag GmbH

Handbook of Semiconductor Technology: Processing of Semiconductors, Volume 2

Editor(s): Kenneth A. Jackson, Wolfgang Schröter

Published Online: 28 MAY 2008

Print ISBN: 9783527298358

Online ISBN: 9783527621828

DOI: 10.1002/9783527621828

About this Book

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In this self-contained handbook deals on the enabling materials technology for the electronics industry world-renowned authors treat the processing of semiconductors and related technologies.

Table of contents

    1. You have free access to this content
      Frontmatter (pages I–XI)

    2. Chapter 1

      Silicon Processing (pages 1–65)

      John G. Wilkes

    3. Chapter 2

      Compound Semiconductor Processing (pages 67–109)

      J. Brian Mullin

    4. Chapter 3

      Epitaxial Growth (pages 111–176)

      Thomas E Kuech and Michael A. Tischler

    5. Chapter 4

      Photolithography (pages 177–263)

      Rainer Leuschner and Georg Pawlowski

    6. Chapter 5

      Selective Doping (pages 265–289)

      Subhash Mahajan

    7. Chapter 6

      Etching Processes in Semiconductor Manufacturing (pages 291–339)

      Kevin G. Oonohoe, Terry Turner and Kenneth A. Jackson

    8. Chapter 7

      Silicon Device Structures (pages 341–390)

      Chun-Yen Chang and Simon M. Sze

    9. Chapter 8

      Compound Semiconductor Device Structures (pages 391–406)

      William E. Stanchina and Juan E Lam

    10. Chapter 9

      Silicon Device Processing (pages 407–487)

      Dim-Lee Kwong

    11. Chapter 10

      Compound Semiconductor Device Processing (pages 489–605)

      John M. Parsey

    12. Chapter 11

      Integrated Circuit Packaging (pages 607–647)

      Daniel I. Amey

    13. Chapter 12

      Interconnection Systems (pages 649–681)

      Wulf Knausenberger

    14. You have free access to this content
      Index (pages 683–703)

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