Reliability of MEMS: Testing of Materials and Devices

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Now available as a softcover edition, this volume presents topical content from AMN, the only book series on microsystems technology, for practicing engineers as well as MSc and PhD students.
The first part of the book is devoted to mechanical property evaluation methods and their contribution to reliability assessment. Chapter one is of an introductory nature, explaining the relationship between MEMS reliability and mechanical properties, as well as the standardization of measurements. The following three chapters cover the measurement methods, while chapter five rounds off the section with reliability evaluation using device-like structures.
The second part provides a broad overview of MEMS devices. Chapters six, seven and eight describe in detail the most successful MEMS-based mechanical sensors, while the final two chapters cover optical MEMS devices, such as variable optical attenuators for fiber optical communication and two-dimensional optical scanners.