Reliability of MEMS: Testing of Materials and Devices

Reliability of MEMS: Testing of Materials and Devices

Editor(s): Osamu Tabata, Toshiyuki Tsuchiya

Published Online: 26 AUG 2008

Print ISBN: 9783527314942

Online ISBN: 9783527622139

DOI: 10.1002/9783527622139

Series Editor(s): Oliver Brand, Gary K. Fedder, Jan G. Korvink, Osamu Tabata

About this Book

This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. A close look at enabling technologies is taken, the first section on MEMS featuring an introduction to the challenges and benefi ts of three-dimensional silicon
processing. An insider's view of industrial MEMS commercialization is followed by chapters on capacitive interfaces for MEMS, packaging issues of micro- and nanosystems, MEMS contributions to high frequency integrated resonators and filters, and the uses of MEMS in mass
data storage and electrochemical imaging by means of scanning micro- and nanoprobes.

The second section on nanodevices first tackles the emerging topic of nanofluidics with a contribution each on simulation tools and on devices and uses, followed by another two on nanosensors featuring CNT sensors and CMOS-based DNA sensor arrays, respectively.

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