Reliability of MEMS: Testing of Materials and Devices
Copyright © 2008 Wiley-VCH Verlag GmbH & Co. KGaA
Editor(s): Osamu Tabata, Toshiyuki Tsuchiya
Published Online: 26 AUG 2008
Print ISBN: 9783527314942
Online ISBN: 9783527622139
Book Series: Advanced Micro and Nanosystems
Series Editor(s): Oliver Brand, Gary K. Fedder, Jan G. Korvink, Osamu Tabata
About this Book
About The Product
Now available as a softcover edition, this volume presents topical content from AMN, the only book series on microsystems technology, for practicing engineers as well as MSc and PhD students.
The first part of the book is devoted to mechanical property evaluation methods and their contribution to reliability assessment. Chapter one is of an introductory nature, explaining the relationship between MEMS reliability and mechanical properties, as well as the standardization of measurements. The following three chapters cover the measurement methods, while chapter five rounds off the section with reliability evaluation using device-like structures.
The second part provides a broad overview of MEMS devices. Chapters six, seven and eight describe in detail the most successful MEMS-based mechanical sensors, while the final two chapters cover optical MEMS devices, such as variable optical attenuators for fiber optical communication and two-dimensional optical scanners.