Reliability of MEMS: Testing of Materials and Devices

Reliability of MEMS: Testing of Materials and Devices

Editor(s): Osamu Tabata, Toshiyuki Tsuchiya

Published Online: 26 AUG 2008

Print ISBN: 9783527314942

Online ISBN: 9783527622139

DOI: 10.1002/9783527622139

Series Editor(s): Oliver Brand, Gary K. Fedder, Jan G. Korvink, Osamu Tabata

About this Book

This first book to cover exclusively and in detail the principles, tools and methods for determining the reliability of microelectromechanical materials, components and devices covers both component materials as well as entire MEMS devices. Divided into two major parts, following a general introductory chapter to reliability issues, the first part looks at the mechanical properties of the materials used in MEMS, explaining in detail the necessary measuring technologies -- nanoindenters, bulge methods, bending tests, tensile tests, and others. Part Two treats the actual devices, organized by important device categories such as pressure sensors, inertial sensors, RF MEMS, and optical MEMS.

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