Advanced Plasma Technology

Advanced Plasma Technology

Editor(s): Riccardo d'Agostino, Pietro Favia, Yoshinobu Kawai, Hideo Ikegami, Noriyoshi Sato, Farzaneh Arefi-Khonsari

Published Online: 8 APR 2008

Print ISBN: 9783527405916

Online ISBN: 9783527622184

DOI: 10.1002/9783527622184

About this Book

A panel of internationally renowned scientists discuss the latest results in plasma technology. This volume has been compiled with both a didactic approach and an overview of the newest achievements for industrial applications. It is divided into two main sections. One is focused on fundamental technology, including plasma production and control, high-pressure discharges, modeling and simulation, diagnostics, dust control, and etching. The section on application technology covers polymer treatments, silicon solar cell, coating and spray, biomaterials, sterilization and waste treatment, plasma propulsion, plasma display panels, and anti-corrosion coatings. The result is an indispensable work for physicists, chemists and engineers involved in the field of plasma technology.

Table of contents

    1. You have free access to this content
    2. Chapter 7

      Advanced Plasma Diagnostics for Thin-Film Deposition (pages 117–136)

      R. Engeln, M. C. M. van de Sanden, W. M. M. Kessels, M. Creatore and D. C. Schram

    3. Chapter 11

      VHF Plasma Production for Solar Cells (pages 211–226)

      Y. Kawai, Y. Takeuchi, H. Mashima, Y. Yamauchi and H. Takatsuka

    4. Chapter 16

      Cold Gas Plasma in Biology and Medicine (pages 301–318)

      E. Stoffels, I. E. Kieft, R. E. J. Sladek, M. A. M. J. Van Zandvoort and D. W. Slaaf

    5. You have free access to this content