LIGA and Its Applications

LIGA and Its Applications

Editor(s): Volker Saile, Ulrike Wallrabe, Osamu Tabata, Jan G. Korvink

Published Online: 5 AUG 2009

Print ISBN: 9783527316984

Online ISBN: 9783527622573

DOI: 10.1002/9783527622573

Series Editor(s): Oliver Brand, Gary K. Fedder, Christopher Hierold, Jan G. Korvink, Osamu Tabata

About this Book

Covering technological aspects as well as the suitability and applicability of various kinds of uses, this handbook shows optimization strategies, techniques and assembly pathways to achieve the combination of complex, even three-dimensional structures with simple manufacturing steps. The authors provide information on markets, commercialization opportunities and aspects of mass or large-scale production as well as design tools, experimental techniques, novel materials, and ideas for future improvements. Not only do they weigh up cost versus quantity, they also consider CMOS and LIGA strategies.
Of interest to physicists, electronics engineers, materials scientists, institutional and industrial libraries as well as graduate students of the relevant disciplines.

Table of contents

    1. You have free access to this content
    2. Chapter 5

      Exposure and Development Simulation for Deep X-Ray LIGA (pages 103–142)

      Prof. Dr. Jan G. Korvink, Sadik Hafizovic, Yoshikazu Hirai and Pascal Meyer

    3. Chapter 6

      Design for LIGA and Safe Manufacturing (pages 143–188)

      Ulrich Gengenbach, Ingo Sieber and Prof. Dr. Ulrike Wallrabe

    4. Chapter 17

      Filled Resist Systems (pages 415–441)

      Thomas Hanemann, Claas Müller and Michael Schulz

    5. You have free access to this content