LIGA and Its Applications
Copyright © 2009 Wiley-VCH Verlag GmbH & Co. KGaA
Editor(s): Volker Saile, Ulrike Wallrabe, Osamu Tabata, Jan G. Korvink
Published Online: 5 AUG 2009
Print ISBN: 9783527316984
Online ISBN: 9783527622573
Book Series: Advanced Micro and Nanosystems
Series Editor(s): Oliver Brand, Gary K. Fedder, Christopher Hierold, Jan G. Korvink, Osamu Tabata
About this Book
Covering technological aspects as well as the suitability and applicability of various kinds of uses, this handbook shows optimization strategies, techniques and assembly pathways to achieve the combination of complex, even three-dimensional structures with simple manufacturing steps. The authors provide information on markets, commercialization opportunities and aspects of mass or large-scale production as well as design tools, experimental techniques, novel materials, and ideas for future improvements. Not only do they weigh up cost versus quantity, they also consider CMOS and LIGA strategies.
Of interest to physicists, electronics engineers, materials scientists, institutional and industrial libraries as well as graduate students of the relevant disciplines.