Handbook of 3D Integration: Technology and Applications of 3D Integrated Circuits

Handbook of 3D Integration: Technology and Applications of 3D Integrated Circuits

Editor(s): Philip Garrou, Christopher Bower, Peter Ramm

Published Online: 25 NOV 2008

Print ISBN: 9783527320349

Online ISBN: 9783527623051

DOI: 10.1002/9783527623051

About this Book

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About The Product

The first encompassing treatise of this new, but very important field puts the known physical limitations for classic 2D electronics into perspective with the requirements for further electronics developments and market necessities. This two-volume handbook presents 3D solutions to the feature density problem, addressing all important issues, such as wafer processing, die bonding, packaging technology, and thermal aspects.
It begins with an introductory part, which defines necessary goals, existing issues and relates 3D integration to the semiconductor roadmap of the industry. Before going on to cover processing technology and 3D structure fabrication strategies in detail. This is followed by fields of application and a look at the future of 3D integration.
The contributions come from key players in the field, from both academia and industry, including such companies as Lincoln Labs, Fraunhofer, RPI, ASET, IMEC, CEA-LETI, IBM, and Renesas.

Table of contents

    1. You have free access to this content
    1. Chapter 2

      Drivers for 3D Integration (pages 13–24)

      Dr. Philip Garrou, Susan Vitkavage and Sitaram Arkalgud

  1. Part I: Through Silicon Via Fabrication

    1. Chapter 4

      Deep Reactive Ion Etching of Through Silicon Vias (pages 45–91)

      Fred Roozeboom, Michiel A. Blauw, Yann Lamy, Eric van Grunsven, Wouter Dekkers, Jan F. Verhoeven, Eric(F.) van den Heuvel, Emile van der Drift, Erwin (W. M. M.) Kessels and Richard (M. C. M.) van de Sanden

    2. Chapter 8

      Copper Plating (pages 133–156)

      Tom Ritzdorf, Rozalia Beica and Charles Sharbono

  2. Part II: Wafer Thinning and Bonding Technology

    1. Chapter 12

      Chip-to-Wafer and Wafer-to-Wafer Integration Schemes (pages 223–248)

      Thorsten Matthias, Stefan Pargfrieder, Markus Wimplinger and Paul Lindner

  3. Part III: Integration Processes

    1. Chapter 19

      3D Integration at CEA-LETI (pages 375–392)

      Barbara Charlet, Lèa Di Cioccio, Patrick Leduc and David Henry

    2. Chapter 20

      Lincoln Laboratory's 3D Circuit Integration Technology (pages 393–411)

      James Burns, Brian Aull, Robert Berger, Nisha Checka, Chang-Lee Chen, Chenson Chen, Pascale Gouker, Craig Keast, Jeffrey Knecht, Antonio Soares, Vyshnavi Suntharalingam, Brian Tyrrell, Keith Warner, Bruce Wheeler, Peter Wyatt and Donna Yost

  4. Part IV: Design, Performance, and Thermal Management

    1. Chapter 29

      Multiproject Circuit Design and Layout in Lincoln Laboratory's 3D Technology (pages 575–582)

      James Burns, Robert Berger, Nisha Checka, Craig Keast, Brian Tyrrell and Bruce Wheeler

  5. Part V: Applications

    1. Chapter 37

      Power Devices (pages 703–721)

      Marc de Samber, Eric van Grunsven and David Heyes

    2. Chapter 38

      Wireless Sensor Systems – The e-CUBES Project (pages 723–746)

      Adrian M. Ionescu, Eric Beyne, Tierry Hilt, Thomas Herndl, Pierre Nicole, Mihai Sanduleanu, Anton Sauer, Herbert Shea, Maaike Taklo, Co Van Veen, Josef Weber, Werner Weber, Jürgen M. Wolf and Peter Ramm

    1. You have free access to this content
    1. You have free access to this content

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