Industrial Ion Sources: Broadbeam Gridless Ion Source Technology
Copyright © 2012 Wiley-VCH Verlag GmbH & Co. KGaA
Author(s): Prof. Viacheslav V. Zhurin
Published Online: 30 NOV 2011 06:31AM EST
Print ISBN: 9783527410293
Online ISBN: 9783527635726
About this Book
Due to the large number of uses of ion sources in academia and industry, those who utilize these sources need up to date and coherent information to keep themselves abreast of developments and options, and to chose ideal solutions for quality and cost-effectiveness. This book, written by an author with a strong industrial background and excellent standing, is the comprehensive guide users and developers of ion sources have been waiting for. Providing a thorough refresher on the physics involved, this resource systematically covers the source types, components, and the operational parameters.