Mechanical Stress on the Nanoscale: Simulation, Material Systems and Characterization Techniques
Copyright © 2011 Wiley-VCH Verlag GmbH & Co. KGaA
Editor(s): Margrit Hanbücken, Pierre Müller, Ralf B. Wehrspohn
Published Online: 12 DEC 2011 10:11AM EST
Print ISBN: 9783527410668
Online ISBN: 9783527639540
About this Book
Bringing together experts from the various disciplines involved, this first comprehensive overview of the current level of stress engineering on the nanoscale is unique in combining the theoretical fundamentals with simulation methods, model systems and characterization techniques.
Essential reading for researchers in microelectronics, optoelectronics, sensing, and photonics.