High-k Gate Dielectrics for CMOS Technology
Copyright © 2012 Wiley-VCH Verlag GmbH & Co. KGaA
Editor(s): Gang He, Zhaoqi Sun
Published Online: 23 AUG 2012 06:24AM EST
Print ISBN: 9783527330324
Online ISBN: 9783527646340
About this Book
A state-of-the-art overview of high-k dielectric materials for advanced field-effect transistors, from both a fundamental and a technological
viewpoint, summarizing the latest research results and development solutions. As such, the book clearly discusses the advantages of these
materials over conventional materials and also addresses the issues that accompany their integration into existing production technologies.
Aimed at academia and industry alike, this monograph combines introductory parts for newcomers to the field as well as advanced sections
with directly applicable solutions for experienced researchers and developers in materials science, physics and electrical engineering.