Advanced Micro and Nanosystems
Series Online ISSN: 1865-3715
Series DOI: 10.1002/SERIES9891
About this Book Series
The book series Advanced Micro & Nanosystems (AMN) provides cutting-edge reviews and detailed case studies by top authors from science and industry, covering technologies, devices and advanced systems from the micro and nano worlds, which together have an immense innovative application potential that opens up with control of shape and function from the atomic level right up to the visible world without any technological gaps.
- Enabling Technology for MEMS and Nanodevices
- CMOS - MEMS
- Microengineering of Metals and Ceramics: Part I: Design, Tooling and Injection Molding
- Microengineering of Metals and Ceramics: Part II: Special Replication Techniques, Automation and Properties
- Micro Process Engineering: Fundamentals, Devices, Fabrication, and Applications
- Reliability of MEMS: Testing of Materials and Devices
- LIGA and Its Applications
- Carbon Nanotube Devices: Properties, Modeling, Integration and Applications