Research Article

Computational solution of the atomic mixing equations

  1. S. M. Kirkup1,*,
  2. M. Wadsworth2,
  3. D. G. Armour3,
  4. R. Badheka3,
  5. J. A. Van Den Berg3

Article first published online: 18 DEC 1998

DOI: 10.1002/(SICI)1099-1204(199807/08)11:4<189::AID-JNM301>3.0.CO;2-A

Issue

International Journal of Numerical Modelling: Electronic Networks, Devices and Fields

International Journal of Numerical Modelling: Electronic Networks, Devices and Fields

Volume 11, Issue 4, pages 189–205, July/August 1998

Additional Information

How to Cite

Kirkup, S. M., Wadsworth, M., Armour, D. G., Badheka, R. and Van Den Berg, J. A. (1998), Computational solution of the atomic mixing equations. International Journal of Numerical Modelling: Electronic Networks, Devices and Fields, 11: 189–205. doi: 10.1002/(SICI)1099-1204(199807/08)11:4<189::AID-JNM301>3.0.CO;2-A

Author Information

  1. 1

    Department of Physics, Astronomy and Mathematics, University of Central Lancashire, Preston PR1 2HE, U.K.

  2. 2

    Department of Computer and Mathematical Sciences, University of Salford, Salford, U.K.

  3. 3

    Department of Physics, University of Salford, Salford, U.K.

*Department of Physics, Astronomy and Mathematics, University of Central Lancashire, Preston PR1 2HE, U.K.

Publication History

  1. Issue published online: 18 DEC 1998
  2. Article first published online: 18 DEC 1998
  3. Manuscript Revised: 5 FEB 1998
  4. Manuscript Received: 12 AUG 1996

Funded by

  • EPSRC
  • DRA. Grant Number: GR/J35160

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Abstract

The atomic mixing model that forms the basis of the IMPETUS software is described in detail. The model simulates the mixing and particle emission that occurs when a solid is bombarded with energetic particles, such as in SIMS or SNMS. The methods employed for computing the deposition of the bombarding particles and their energies along with the modelling of the particle yield and the surface recession speed are described.

The material volume concentrations are governed by a set of partial differential equations. A description of the finite element method that is employed for their solution is given. Results from the application of IMPETUS II to a number of typical structures are given. © 1998 John Wiley & Sons, Ltd.

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