The Role of the Thermal Oxide in GaAs-Based Photonic Bandgap Waveguide Microcavities (pages 501–505)
Kuo-Yi Lim, Daniel J. Ripin, Gale S. Petrich, Pierre R. Villeneuve, Shanhui Fan, J. D. Joannopoulos, Erich P. Ippen and Leslie A. Kolodziejski
Version of Record online: 30 APR 1999 | DOI: 10.1002/(SICI)1521-4095(199904)11:6<501::AID-ADMA501>3.0.CO;2-H
Optical microcavities can be fabricated in III–V semiconductors by introducing a large periodic refractive-index variation along the axis of GaAs waveguides. The critical role of thermal oxide materials in the design of the microcavities (see Fig.) is outlined, and the characterization of the properties of the oxide relevant to device construction described. Preliminary data demonstrating the realization of such a microcavity are presented.