14. In Situ Characterization of Deposition

  1. Milan Paunovic1 and
  2. Mordechay Schlesinger2

Published Online: 21 NOV 2005

DOI: 10.1002/0470009403.ch14

Fundamentals of Electrochemical Deposition, Second Edition

Fundamentals of Electrochemical Deposition, Second Edition

How to Cite

Paunovic, M. and Schlesinger, M. (2006) In Situ Characterization of Deposition, in Fundamentals of Electrochemical Deposition, Second Edition, John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/0470009403.ch14

Author Information

  1. 1

    Formerly with IBM Research Division, Yorktown Heights, NY, USA

  2. 2

    University of Windsor, Windsor, Ontario, Canada

Publication History

  1. Published Online: 21 NOV 2005
  2. Published Print: 17 JUL 2006

ISBN Information

Print ISBN: 9780471712213

Online ISBN: 9780470009406

SEARCH

Keywords:

  • in situ characterization of deposition;
  • chemical mechanical polishing;
  • in situ test in tribology

Summary

This chapter contains sections titled:

  • Introduction

  • Electrochemical Studies

  • Solid-State Studies (Chemical Mechanical Polishing)

  • Discussion

  • In Situ Test in Tribology

  • High-Resolution Electron Microscopy

  • References and Further Reading

  • Problems