Chapter 10. Silicon Fabrication Techniques for MEMS

  1. Vijay K. Varadan Chair Professor Director editor Editor-in-Chief Associate Editor1,
  2. K. J. Vinoy M.Tech, Ph.D. Assistant Professor research assistant2 and
  3. S. Gopalakrishnan Master's Degree in Engineering Mechanics, Ph.D. Assistant Professor Associate Professor Fellow2

Published Online: 19 OCT 2006

DOI: 10.1002/0470093633.ch10

Smart Material Systems and MEMS: Design and Development Methodologies

Smart Material Systems and MEMS: Design and Development Methodologies

How to Cite

Varadan, V. K., Vinoy, K. J. and Gopalakrishnan, S. (2006) Silicon Fabrication Techniques for MEMS, in Smart Material Systems and MEMS: Design and Development Methodologies, John Wiley & Sons, Ltd, Chichester, UK. doi: 10.1002/0470093633.ch10

Author Information

  1. 1

    University of Arkansas, USA

  2. 2

    Indian Institute of Science, Bangalore, India

Publication History

  1. Published Online: 19 OCT 2006
  2. Published Print: 1 SEP 2006

ISBN Information

Print ISBN: 9780470093610

Online ISBN: 9780470093634



  • micromachining and micro electromechanical system (MEMS) fabrication;
  • MEMS silicon fabrication techniques;
  • etching and bulk micromachining;
  • field-assisted thermal bonding or electrostatic bonding;
  • metallo-organic chemical vapor deposition (MOCVD);
  • etch-stop techniques;
  • pulsed potential anodization technique;
  • photovoltaic electrochemical etch-stop technique (PHET);
  • silicon surface micromachining


This chapter contains sections titled:

  • Introduction

  • Fabrication processes for silicon MEMS

  • Deposition techniques for thin films in MEMS

  • Bulk micromachining for silicon-based MEMS

  • Silicon surface micromachining

  • Processing by both bulk and surface micromachining

  • LIGA process

  • References