Chapter 13. Fabrication Examples of Smart Microsystems

  1. Vijay K. Varadan Chair Professor Director editor Editor-in-Chief Associate Editor1,
  2. K. J. Vinoy M.Tech, Ph.D. Assistant Professor research assistant2 and
  3. S. Gopalakrishnan Master's Degree in Engineering Mechanics, Ph.D. Assistant Professor Associate Professor Fellow2

Published Online: 19 OCT 2006

DOI: 10.1002/0470093633.ch13

Smart Material Systems and MEMS: Design and Development Methodologies

Smart Material Systems and MEMS: Design and Development Methodologies

How to Cite

Varadan, V. K., Vinoy, K. J. and Gopalakrishnan, S. (2006) Fabrication Examples of Smart Microsystems, in Smart Material Systems and MEMS: Design and Development Methodologies, John Wiley & Sons, Ltd, Chichester, UK. doi: 10.1002/0470093633.ch13

Author Information

  1. 1

    University of Arkansas, USA

  2. 2

    Indian Institute of Science, Bangalore, India

Publication History

  1. Published Online: 19 OCT 2006
  2. Published Print: 1 SEP 2006

ISBN Information

Print ISBN: 9780470093610

Online ISBN: 9780470093634

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Keywords:

  • poly(vinylidene fluoride) (PVDF);
  • PVDF transducers;
  • smart microsystem fabrication examples;
  • surface acoustic wave (SAW)-based accelerometer;
  • enzyme-immobilized sensors;
  • microfluidic polymeric fabrication system;
  • poly(methyl methacrylate) (PMMA)

Summary

This chapter contains sections titled:

  • Introduction

  • PVDF transducers

  • SAW accelerometer

  • Chemical and biosensors

  • Polymeric fabrication of a microfluidic system

  • References