Chapter 2. Processing of Smart Materials

  1. Vijay K. Varadan Chair Professor Director editor Editor-in-Chief Associate Editor1,
  2. K. J. Vinoy M.Tech, Ph.D. Assistant Professor research assistant2 and
  3. S. Gopalakrishnan Master's Degree in Engineering Mechanics, Ph.D. Assistant Professor Associate Professor Fellow2

Published Online: 19 OCT 2006

DOI: 10.1002/0470093633.ch2

Smart Material Systems and MEMS: Design and Development Methodologies

Smart Material Systems and MEMS: Design and Development Methodologies

How to Cite

Varadan, V. K., Vinoy, K. J. and Gopalakrishnan, S. (2006) Processing of Smart Materials, in Smart Material Systems and MEMS: Design and Development Methodologies, John Wiley & Sons, Ltd, Chichester, UK. doi: 10.1002/0470093633.ch2

Author Information

  1. 1

    University of Arkansas, USA

  2. 2

    Indian Institute of Science, Bangalore, India

Publication History

  1. Published Online: 19 OCT 2006
  2. Published Print: 1 SEP 2006

ISBN Information

Print ISBN: 9780470093610

Online ISBN: 9780470093634

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Keywords:

  • silicon-based micro-fabrication;
  • semiconductor substrates and MEMS-based smart microsystems;
  • smart material systems and MEMS;
  • metals and metallization techniques;
  • metallo-organic chemical vapor deposition (MOCVD);
  • Barium strontium titanate (BST);
  • silicon micromachining techniques;
  • UV radiation polymer curing;
  • microwave CVD use

Summary

This chapter contains sections titled:

  • Introduction

  • Semiconductors and their processing

  • Metals and metallization techniques

  • Ceramics

  • Silicon micromachining techniques

  • Polymers and their synthesis

  • UV radiation curing of polymers

  • Deposition techniques for polymer thin films

  • Properties and synthesis of carbon nanotubes

  • References