Chapter 11. The Design of an Ultra-Pure Water System for Use in the Manufacture of Integrated Circuits

  1. W. Whyte
  1. R. Galbraith

Published Online: 24 APR 2002

DOI: 10.1002/0470842040.ch11

Cleanroom Design, Second Edition

Cleanroom Design, Second Edition

How to Cite

Galbraith, R. (1999) The Design of an Ultra-Pure Water System for Use in the Manufacture of Integrated Circuits, in Cleanroom Design, Second Edition (ed W. Whyte), John Wiley & Sons, Ltd, Chichester, UK. doi: 10.1002/0470842040.ch11

Editor Information

  1. University of Glasgow, UK

Author Information

  1. Motorola Limited, Glasgow, UK

Publication History

  1. Published Online: 24 APR 2002
  2. Published Print: 25 FEB 1999

ISBN Information

Print ISBN: 9780471942047

Online ISBN: 9780470842041

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Summary

This chapter has sections titled:

  • Introduction

  • Impact of Contaminated Water

  • Plant Design