Chapter 12. The Production and Transmission of High Purity Gases for the Semiconductor Industry

  1. W. Whyte
  1. R. Galbraith

Published Online: 24 APR 2002

DOI: 10.1002/0470842040.ch12

Cleanroom Design, Second Edition

Cleanroom Design, Second Edition

How to Cite

Galbraith, R. (1999) The Production and Transmission of High Purity Gases for the Semiconductor Industry, in Cleanroom Design, Second Edition (ed W. Whyte), John Wiley & Sons, Ltd, Chichester, UK. doi: 10.1002/0470842040.ch12

Editor Information

  1. University of Glasgow, UK

Author Information

  1. Motorola Limited, Glasgow, UK

Publication History

  1. Published Online: 24 APR 2002
  2. Published Print: 25 FEB 1999

ISBN Information

Print ISBN: 9780471942047

Online ISBN: 9780470842041

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Summary

This chapter has sections titled:

  • Introduction

  • Uses of Bulk Gases

  • Impurities in Gases

  • Production and Transport of Nitrogen

  • Production and Transport of Oxygen

  • Production and Transport of Argon

  • Production and Transport of Hydrogen

  • Gas Distribution Systems

  • Concluding Remarks