Chapter 5. Depth Profile Analysis

  1. R. Kenneth Marcus2 and
  2. José A. C. Broekaert3
  1. A. Bengston

Published Online: 3 APR 2003

DOI: 10.1002/0470857854.ch5

Glow Discharge Plasmas in Analytical Spectroscopy

Glow Discharge Plasmas in Analytical Spectroscopy

How to Cite

Bengston, A. (2002) Depth Profile Analysis, in Glow Discharge Plasmas in Analytical Spectroscopy (eds R. K. Marcus and J. A. C. Broekaert), John Wiley & Sons, Ltd, Chichester, UK. doi: 10.1002/0470857854.ch5

Editor Information

  1. 2

    Department of Chemistry, Clemson University, Clemson, SC 29634-1905, USA

  2. 3

    University of Hamburg, Institute for Inorganic and Applied Chemistry, Martin-Luther-King-Platz 6, D-20146 Hamburg, Germany

Author Information

  1. Swedish Institute for Metals Research, Drottning Kristinas vag 48, S-111428 Stockholm, Sweden

Publication History

  1. Published Online: 3 APR 2003
  2. Published Print: 27 NOV 2002

ISBN Information

Print ISBN: 9780471606994

Online ISBN: 9780470857854

SEARCH

Summary

This chapter contains sections titled:

  • Introduction

  • Instrumentation

  • Practical Aspects and Results

  • Conclusions

  • References