Chapter 1. Historical Overview
- Wei Zhu Ph.D.
Published Online: 15 APR 2002
DOI: 10.1002/0471224332.ch1
Copyright © 2001 by John Wiley & Sons, Inc.
Book Title

Vacuum Microelectronics
Additional Information
How to Cite
Utsumi, T. (2002) Historical Overview, in Vacuum Microelectronics (ed W. Zhu), John Wiley & Sons, Inc., New York, USA. doi: 10.1002/0471224332.ch1
Editor Information
Bell Laboratories—Lucent Technologies, 600 Mountain Avenue, Murray Hill, NJ 07974, USA
Publication History
- Published Online: 15 APR 2002
- Published Print: 1 OCT 2001
ISBN Information
Print ISBN: 9780471322443
Online ISBN: 9780471224334
- Summary
- Chapter
Keywords:
- Shoulders' proposal;
- Spindt cathode;
- field emitter arrays;
- history of vacuum microelectronics;
- vacuum device characteristics
Summary
Chapter 1 reviews the historical developments in the field of vacuum microelectronics. It covers:
Shoulders' proposal of fabricating vacuum devices of micron sizes
Invention of Spindt cathode or field emitter arrays
History of International Vacuum Microelectronics Conferences (IVMCs)
New cold cathode materials such as diamond and carbon nanotubes
Comparison of solid state and vacuum microelectronic device characteristics.
