Chapter 1. Historical Overview

  1. Wei Zhu Ph.D.
  1. Takao Utsumi

Published Online: 15 APR 2002

DOI: 10.1002/0471224332.ch1

Vacuum Microelectronics

Vacuum Microelectronics

How to Cite

Utsumi, T. (2001) Historical Overview, in Vacuum Microelectronics (ed W. Zhu), John Wiley & Sons, Inc., New York, USA. doi: 10.1002/0471224332.ch1

Editor Information

  1. Bell Laboratories—Lucent Technologies, 600 Mountain Avenue, Murray Hill, NJ 07974, USA

Author Information

  1. LEEPL Corporation, 4155 Akiya, Yokosuka 240-0105, Japan

Publication History

  1. Published Online: 15 APR 2002
  2. Published Print: 1 OCT 2001

ISBN Information

Print ISBN: 9780471322443

Online ISBN: 9780471224334



  • Shoulders' proposal;
  • Spindt cathode;
  • field emitter arrays;
  • history of vacuum microelectronics;
  • vacuum device characteristics


Chapter 1 reviews the historical developments in the field of vacuum microelectronics. It covers:

  • Shoulders' proposal of fabricating vacuum devices of micron sizes

  • Invention of Spindt cathode or field emitter arrays

  • History of International Vacuum Microelectronics Conferences (IVMCs)

  • New cold cathode materials such as diamond and carbon nanotubes

  • Comparison of solid state and vacuum microelectronic device characteristics.