Chapter 4. Spindt Field Emitter Arrays

  1. Wei Zhu Ph.D.
  1. Charles A. (CAPP) Spindt,
  2. Ivor Brodie,
  3. Christopher E. Holland and
  4. Paul R. Schwoebel

Published Online: 15 APR 2002

DOI: 10.1002/0471224332.ch4

Vacuum Microelectronics

Vacuum Microelectronics

How to Cite

Spindt, C. A., Brodie, I., Holland, C. E. and Schwoebel, P. R. (2001) Spindt Field Emitter Arrays, in Vacuum Microelectronics (ed W. Zhu), John Wiley & Sons, Inc., New York, USA. doi: 10.1002/0471224332.ch4

Editor Information

  1. Bell Laboratories—Lucent Technologies, 600 Mountain Avenue, Murray Hill, NJ 07974, USA

Author Information

  1. SRI International, 333 Ravenswood Avenue, Menlo Park, California 94025-3493

Publication History

  1. Published Online: 15 APR 2002
  2. Published Print: 1 OCT 2001

ISBN Information

Print ISBN: 9780471322443

Online ISBN: 9780471224334

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Keywords:

  • Spindt cathode;
  • molybdenum emitter;
  • fabrication of field emitter arrays;
  • lithography;
  • cathode performance;
  • electron trajectory modeling;
  • emitter materials;
  • tip shape;
  • tip build-up;
  • environmental effects;
  • emission stabilization;
  • emission fluctuation;
  • emission noise

Summary

Chapter 4 introduces the all-important Spindt cathode that essentially laid the foundation for present-day vacuum microelectronics. It describes in detail

  • Fabrication technology of Spindt field emitter arrays

  • Operating characteristics of the microfabricated gated cathodes

  • Many of the very significant application opportunities that exist for this cathode technology.