Standard Article

Simulation of Chemical Vapor Deposition Processes

Computation and Theoretical Methods

  1. Chris R. Kleijn1,
  2. Carlo Cavallotti2

Published Online: 12 OCT 2012

DOI: 10.1002/0471266965.com016.pub2

Characterization of Materials

Characterization of Materials

How to Cite

Kleijn, C. R. and Cavallotti, C. 2012. Simulation of Chemical Vapor Deposition Processes. Characterization of Materials. 1–19.

Author Information

  1. 1

    Delft University of Technology, Delft, The Netherlands

  2. 2

    Politecnico di Milano, Milan, Italy

Publication History

  1. Published Online: 12 OCT 2012

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