Standard Article

“Total” Ion Beam Analysis—3D Imaging of Complex Samples Using MeV Ion Beams

Ion-Beam Techniques

  1. Chris Jeynes

Published Online: 12 OCT 2012

DOI: 10.1002/0471266965.com086.pub2

Characterization of Materials

Characterization of Materials

How to Cite

Jeynes, C. 2012. “Total” Ion Beam Analysis—3D Imaging of Complex Samples Using MeV Ion Beams. Characterization of Materials. 1–12.

Author Information

  1. University of Surrey Ion Beam Centre, Guildford, England

Publication History

  1. Published Online: 12 OCT 2012


“Total-IBA” indicates ion beam analysis (IBA) methods that use multiple individual IBA techniques (RBS, EBS, ERD, NRA, PIXE) self-consistently. The synergy between the complementary techniques allows much more information about the sample to be extracted than is available from the sum of the information from each technique alone. Large new classes of samples are now tractable to ion beam analysis. 3D chemical imaging may even be possible by IBA.

In this chapter, the synergy between a number of closely related techniques for thin-film depth profiling is described; they all use ion beams from megavolt (MV) accelerators as probes. This introductory article will not describe the techniques themselves but will concentrate specifically on the synergisms available.


  • RBS and EBS;
  • ERD;
  • NRA;
  • PIXE;
  • synergy