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High-Resolution 3D Imaging and Material Analysis with Transmission X-ray Microscopy and Nano-CT

X-Ray Techniques

  1. Yuxin Wang

Published Online: 18 MAY 2012

DOI: 10.1002/0471266965.com133

Characterization of Materials

Characterization of Materials

How to Cite

Wang, Y. 2012. High-Resolution 3D Imaging and Material Analysis with Transmission X-ray Microscopy and Nano-CT. Characterization of Materials. 1–10.

Author Information

  1. Argonne National Laboratory, Advanced Photon Source, Argonne, IL, USA

Publication History

  1. Published Online: 18 MAY 2012

Abstract

Lens-based x-ray microscopy and nano-CT is a relatively new approach for imaging and characterizing nanostructures. To date, tens of nanometer resolution in 2D and 3D is routinely achieved with both commercial laboratory systems and instruments based at synchrotron radiation facilities. The nondestructive nature of the technique makes it particularly well suited for in situ studies on dynamic behavior of nanostructures while in or near their real operation conditions. With the use of tunable synchrotron x-ray sources, the elemental and certain chemical compositions can also be mapped accurately in 3D with 1%-level sensitivity. This paper provides an introduction to this technique with examples in several application areas.

Keywords:

  • x-ray microscopy;
  • TXM;
  • nano-CT;
  • XANES;
  • Fresnel zone plate