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Scanning Helium Ion Microscopy

Ion-Beam Techniques

  1. H. X. Guo,
  2. D. Fujita

Published Online: 12 OCT 2012

DOI: 10.1002/0471266965.com141

Characterization of Materials

Characterization of Materials

How to Cite

Guo, H. X. and Fujita, D. 2012. Scanning Helium Ion Microscopy. Characterization of Materials. 1–9.

Author Information

  1. National Institute for Materials Science (NIMS), Tsukuba, Ibaraki, Japan

Publication History

  1. Published Online: 12 OCT 2012


Based on a field ion microscope, a scanning helium ion microscope has been developed for surface observation and modification. High-brightness, small-energy-spread, and small-wavelength helium ion beam is produced from a trimer of the gas field ion source. High-resolution secondary electron images and Rutherford backscattered ion images are obtained by using an Everhart–Thornley detector and a microchannel plate detector, respectively. This novel microscope provides high resolution, high depth of focus observation and precise nanofabrication on various material surfaces.


  • scanning ion microscopy;
  • nanoscale characterization;
  • helium ion microscopy;
  • nano fabrication;
  • high resolution microscopy