Secondary Ion Mass Spectrometry
Published Online: 12 OCT 2012
Copyright © 2003 by John Wiley & Sons, Inc. All rights reserved.
Characterization of Materials
How to Cite
Watts, J. F., Wolstenholme, J. and Webb, R. P. 2012. Secondary Ion Mass Spectrometry. Characterization of Materials. 1–33.
- Published Online: 12 OCT 2012
An overview of secondary ion mass spectrometry (SIMS) is given. It is placed in context of other surface analytical techniques. The SIMS technique is divided into static, dynamic, and imaging SIMS. The basic operations, assumptions, and variations are explained with examples from the scientific literature. Problems associated with interpreting the collected data and the ways in which the data is interpreted are given. The recommendations from ASTM and ISO in the use of SIMS and interpretation of the data are referenced.
- secondary ion mass spectrometry (SIMS);
- molecular imaging;
- depth profiling;
- materials characterisation;
- elemental analysis;
- molecular analysis