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Atom Probe Tomography and Field Ion Microscopy

Ion-Beam Techniques

  1. M. K. Miller

Published Online: 18 MAY 2012

DOI: 10.1002/0471266965.com145

Characterization of Materials

Characterization of Materials

How to Cite

Miller, M. K. 2012. Atom Probe Tomography and Field Ion Microscopy. Characterization of Materials. 1–12.

Author Information

  1. Oak Ridge National Laboratory, Materials Science and Technology Division, Oak Ridge, TN, USA

Publication History

  1. Published Online: 18 MAY 2012


Atom probe tomography is a characterization technique for the analysis of the microstructure of materials at the atomic level. The basic concepts of atom probe tomography and field ion microscopy, the implementations of a field ion microscope and a three-dimensional atom probe, including the state-of-the-art local electrode atom probe, and laser and voltage pulsing methods of field evaporation are outlined in this chapter. Methods of atom probe tomography specimen preparation by electropolishing and focused ion beam methods are described. An overview of data visualization and analysis as well as data mining techniques is presented.


  • field ion microscopy (FIM);
  • atom probe field ion microscopy (APFIM);
  • atom probe tomography (APT);
  • three-dimensional atom probe (3DAP);
  • local electrode atom probe (LEAP);
  • field evaporation