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Scanning Near-Field Optical Microscopy

Scanning Probe Techniques

  1. Michael R. Beversluis,
  2. Stephan J. Stranick

Published Online: 12 OCT 2012

DOI: 10.1002/0471266965.com153

Characterization of Materials

Characterization of Materials

How to Cite

Beversluis, M. R. and Stranick, S. J. 2012. Scanning Near-Field Optical Microscopy. Characterization of Materials. 1–12.

Author Information

  1. Surface Science and Microanalysis Division, The National Institute of Standards and Technology, Gaithersburg, MD, USA

Publication History

  1. Published Online: 12 OCT 2012


This article describes the setup and use of scanning near-field optical microscopes for use in nanometer scale material imaging and characterization. We describe the concepts behind near-field imaging that allow the technique to reach spatial resolution far below the diffraction limit of conventional optical microscopy.


  • optical microscopy;
  • near-field optics;
  • evanescent fields;
  • scanning microscopy;
  • spectroscopy;
  • apertureless microscopy;
  • tip-enhanced microscopy;
  • fluorescence imaging;
  • Raman scattering