Chapter 11. Nanolithography

  1. Paras N. Prasad

Published Online: 26 AUG 2004

DOI: 10.1002/0471670251.ch11



How to Cite

Prasad, P. N. (2004) Nanolithography, in Nanophotonics, John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/0471670251.ch11

Publication History

  1. Published Online: 26 AUG 2004
  2. Published Print: 17 MAR 2004

ISBN Information

Print ISBN: 9780471649885

Online ISBN: 9780471670254



  • nanolithography;
  • two-photon lithography;
  • near-field lithography;
  • plasmon printing;
  • nanosphere lithography;
  • dip-pen nanolithography;
  • nanoimprint lithography;
  • photonically aligned nanoarrays


Chapter 11 introduces nanolithography, broadly defined, that is used to fabricate nanoscale optical structures. Both optical and nonoptical methods are described, and some illustrative examples of applications are presented. The use of direct two-photon absorption, a nonlinear optical process, provides improved resolution leading to smaller photoproduced nanostructures compared to those produced by linear absorption.