2. Lithographic Applications of Highly Metallized Polyferrocenylsilanes

  1. Alaa S. Abd-El-Aziz2,
  2. Charles E. Carraher Jr.3,
  3. Charles U. Pittman Jr.4 and
  4. Martel Zeldin5
  1. Alison Y. Cheng,
  2. Scott B. Clendenning and
  3. Ian Manners

Published Online: 19 OCT 2005

DOI: 10.1002/0471747319.ch2

Macromolecules Containing Metal and Metal-Like Elements: Transition Metal-Containing Polymers, Volume 6

Macromolecules Containing Metal and Metal-Like Elements: Transition Metal-Containing Polymers, Volume 6

How to Cite

Cheng, A. Y., Clendenning, S. B. and Manners, I. (2005) Lithographic Applications of Highly Metallized Polyferrocenylsilanes, in Macromolecules Containing Metal and Metal-Like Elements: Transition Metal-Containing Polymers, Volume 6 (eds A. S. Abd-El-Aziz, C. E. Carraher, C. U. Pittman and M. Zeldin), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/0471747319.ch2

Editor Information

  1. 2

    Department of Chemistry, The University of Winnipeg, Winnipeg, Manitoba, R3B 2E9, Canada

  2. 3

    Department of Chemistry and Biochemistry, Florida Atlantic University, Boca Raton, FL 33431 and Florida Center for Environmental Studies, Palm Beach Gardens, FL 33410, Florida, USA

  3. 4

    Department of Chemistry, Mississippi State University, Mississippi State, Mississippi, USA

  4. 5

    Department of Chemistry, University of Richmond, Richmond, Virginia, USA

Author Information

  1. Department of Chemistry, University of Toronto, 80 St. George Street, Toronto, Ontario, M5S 3H6, Canada

Publication History

  1. Published Online: 19 OCT 2005
  2. Published Print: 7 OCT 2005

ISBN Information

Print ISBN: 9780471684459

Online ISBN: 9780471747314

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Keywords:

  • XPS;
  • TOF SIMS;
  • polyferrocenylsilanes;
  • ferrocene-containing polymers;
  • lithographic resists;
  • resists;
  • surface patterning;
  • metallized polyferrocenylsilanes;
  • ROP;
  • TEM

Summary

The use of ferrocene-containing polymers to act as lithographic resists is presented. The patterning of surfaces allows the fabrication of materials with useful optical, electrical, magnetic, catalytic, sensing properties is described using polyferrocenylsilanes. Physical characterization of these important materials is given.