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Ion Beam Techniques

  1. Gerhard K. Wolf1,
  2. Wolfgang Ensinger2

Published Online: 15 MAR 2003

DOI: 10.1002/14356007.g14_g01

Ullmann's Encyclopedia of Industrial Chemistry

Ullmann's Encyclopedia of Industrial Chemistry

How to Cite

Wolf, G. K. and Ensinger, W. 2003. Ion Beam Techniques. Ullmann's Encyclopedia of Industrial Chemistry. .

Author Information

  1. 1

    Universität Heidelberg, Physikalisch Chemisches Institut, Heidelberg, Germany

  2. 2

    Universität Marburg, Analytische und Kernchemie, Marburg, Germany

Publication History

  1. Published Online: 15 MAR 2003

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Abstract

The article contains sections titled:

1.Introduction
2.Interaction of Ions with Matter
3.Equipment for Ion Beam Generation and Application
3.1.Gaseous Ion Sources
3.2.Solid Sources
3.3.IBAD Facilities
4.Applications
4.1.Semiconductor Processing
4.2.Metal Modification
4.3.Ion Beam Modification of Insulators
4.3.1.Ion Implantation and Ion Bombardment
4.3.2.Metallization and Ion Beam Assisted Coatings
5.Outlook