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Imaging Technology, 5. Photochemical Machining

  1. David Allen

Published Online: 15 OCT 2011

DOI: 10.1002/14356007.o13_o11

Ullmann's Encyclopedia of Industrial Chemistry

Ullmann's Encyclopedia of Industrial Chemistry

How to Cite

Allen, D. 2011. Imaging Technology, 5. Photochemical Machining. Ullmann's Encyclopedia of Industrial Chemistry. .

Author Information

  1. College of Manufacturing, Cranfield Institute of Technology, Cranfield, United Kingdom

Publication History

  1. Published Online: 15 OCT 2011

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Abstract

The article contains sections titled:

1.Introduction
2.Artwork Generation and Phototool Production
3.Materials
4.Photoresist Systems
5.Etching Technology
6.Process Capability
7.Economic Aspects
8.Products