Sensor Technology

Micromachined Silicon Gyroscope

  1. Kuniki Ohwada,
  2. Yochi Mochida,
  3. Hiroshi Kawai

Article first published online: 12 SEP 2001

DOI: 10.1002/1616-8984(199911)6:1<95::AID-SEUP95>3.0.CO;2-7

Issue

Sensors Update

Sensors Update

Volume 6, Issue 1, pages 95–116, November 1999

Additional Information

How to Cite

Ohwada, K., Mochida, Y. and Kawai, H. (1999), Micromachined Silicon Gyroscope. Sensors Update, 6: 95–116. doi: 10.1002/1616-8984(199911)6:1<95::AID-SEUP95>3.0.CO;2-7

Author Information

  1. Murata Manufacturing Co., Ltd., 1-18-1 Hakusan, Midori-ku, Yokohama, 226, 0006, Japan

Publication History

  1. Issue published online: 12 SEP 2001
  2. Article first published online: 12 SEP 2001

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