Chapter 4. The Electrochemical Dissolution of Silicon

  1. Dr. Volker Lehmann

Published Online: 6 MAR 2002

DOI: 10.1002/3527600272.ch4

Electrochemistry of Silicon: Instrumentation, Science, Materials and Applications

Electrochemistry of Silicon: Instrumentation, Science, Materials and Applications

How to Cite

Lehmann, V. (2002) The Electrochemical Dissolution of Silicon, in Electrochemistry of Silicon: Instrumentation, Science, Materials and Applications, Wiley-VCH Verlag GmbH, Weinheim, FRG. doi: 10.1002/3527600272.ch4

Author Information

  1. Infineon Technologies AG, Corporate Research, Otto-Hahn-Ring 6, 81739 München, Germany

Publication History

  1. Published Online: 6 MAR 2002
  2. Published Print: 22 FEB 2002

ISBN Information

Print ISBN: 9783527293216

Online ISBN: 9783527600274

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Keywords:

  • silicon, electrochemical dissolution;
  • dissolution valence;
  • characteristic anodic currents in HF;
  • reverse currents;
  • electron and hole injection;
  • electrochemical etch stops;
  • photoelectrochemical etching

Summary

  • Electrochemical Reactions

    • Overall Reaction

    • Chemical Dissolution of Si in Alkaline Solutions

    • Divalent Electrochemical Dissolution of Si in HF

    • Tetravalent Electrochemical Dissolution of Si in HF

  • The Dissolution Valence

  • The Characteristic Anodic Currents in HF

  • Reverse Currents, Electron and Hole Injection

    • Electron Injection under Anodic Bias without Illumination

    • Hole Injection under Cathodic Bias without Illumination

    • Electron Injection under Anodic Bias with Illumination

    • Electron Injection Caused by a Dissolving Oxide Film

  • Electrochemical Etch Stops

  • Photoelectrochemical Etching