Chapter 5. Anodic Oxidation

  1. Dr. Volker Lehmann

Published Online: 6 MAR 2002

DOI: 10.1002/3527600272.ch5

Electrochemistry of Silicon: Instrumentation, Science, Materials and Applications

Electrochemistry of Silicon: Instrumentation, Science, Materials and Applications

How to Cite

Lehmann, V. (2002) Anodic Oxidation, in Electrochemistry of Silicon: Instrumentation, Science, Materials and Applications, Wiley-VCH Verlag GmbH, Weinheim, FRG. doi: 10.1002/3527600272.ch5

Author Information

  1. Infineon Technologies AG, Corporate Research, Otto-Hahn-Ring 6, 81739 München, Germany

Publication History

  1. Published Online: 6 MAR 2002
  2. Published Print: 22 FEB 2002

ISBN Information

Print ISBN: 9783527293216

Online ISBN: 9783527600274

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Keywords:

  • silicon oxidation techniques;
  • anodic oxide formation;
  • ionic transport;
  • oxide morphology;
  • electrochemical oscillations;
  • electropolishing

Summary

  • Silicon Oxidation Techniques

  • Native and Chemical Oxides

  • Anodic Oxide Formation and Ionic Transport

  • Oxide Morphology, Chemical Composition and Electrical Properties

    • Morphology of Anodic Oxides

    • Chemical Composition of Anodic Oxides

    • Electrical Properties of Anodic Oxides

  • Electrochemical Oscillations

  • Electropolishing